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Prof. Dr. Ulf KleinebergLudwig-Maximilians-Universität München
Lehrstuhl für Experimentalphysik - Laserphysik
Fakultät für Physik
Am Coulombwall 1
85748 Garching, Germany
| office: | 223 |
| phone: | (+49 89) 289 – 14003 |
| fax: | (+49 89) 289 – 14141 |
| email: |
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contact
research expertise and fields
- Soft x-ray optics/physics, surface and thin film physics, attosecond physics; synchrotron radiation and FEL physics
- Electron microscopy, electron beam lithography, nanolithography, self assembly
- Development of multilayer soft x-ray optics for attosecond XUV pulses
- Measurement and control of electronic dynamics in nanostructures
- Ultrafast nano-plasmonics
- Time-resolved x-ray photoelectron spectroscopy and photoelectron emission microscopy
- Metrology for extreme ultraviolet lithography EUVL
current interests and projects
- Ultrawide band instrumentation
- Pushing the frontiers of attosecond metrology and spectroscopy
- Collective electron dynamics in metallic nanoparticles
- Ultrashort x-ray sources
- Probing the spatio-temporal dynamics of localized surface plasmon fields with nanometer spatial and attosecond temporal resolution
- Setup of a highly brillant coherent EUV light source for metrology and nanolithography in the EUV spectral range

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