back
Dr. Jingquan LinSchool of Science
Changchun University of Science and Technology
130022 Changchun, China
| email: |
|
research expertise and fields
- Actinic inspection of EUV lithography mask blank defects using Photoemission Electron Microscopy (PEEM)
- Low debris target laser plasma light source for EUV lithography
- High intensity femtosecond laser pulse generated plasma
- Table top soft-x-ray laser
current interests and projects
- Characterization of ultrafast nanoplasmonic field using PEEM
- Development of chirped broadband XUV multilayer mirror
back